Semiconductor device

ABSTRACT

An object of the present invention is to provide a semiconductor device having a structure in which a resin hardly enters between an insert electrode and a nut at a time of resin sealing. The semiconductor device according to the present invention includes an insert electrode having an insert hole into which a bolt is inserted from outside, a nut which has a screw hole to be screwed with the bolt and is disposed on an inside of the insert electrode so that the screw hole is communicated with the insert hole, at least one semiconductor element being electrically connected to the insert electrode, and a resin sealing the inside of the insert electrode, the nut, and the at least one semiconductor element, wherein a burr is provided on an outer periphery of a direct contact surface of the nut being in direct contact with the insert electrode.

TECHNICAL FIELD

The present invention relates to a semiconductor device, andparticularly to a semiconductor device including an insert electrode tobe connected to an external electrode.

BACKGROUND ART

Known as a semiconductor device used as a power module used for a motorcontrol and an inverter of an air conditioner, for example, is asemiconductor device including a heatsink, a heat radiation insulatingsubstrate joined to the heatsink, a semiconductor element disposed onthe heat radiation insulating substrate, and an insert electrode forconnecting the semiconductor element to an external electrode.

A nut is disposed on an inside of the insert electrode, and a bolt canbe screwed from an outside of the insert electrode (that is to say, anoutside of the semiconductor device). The inside of the insertelectrode, the nut, and the semiconductor element, for example, aresealed with a sealing resin.

When there is a slight gap between the insert electrode and the nut at atime of resin sealing (also referred to as a resin molding), the resinenters the gap. Then, an intrusion of the resin between the insertelectrode and the nut occurs after the resin sealing.

The intrusion of the resin between the insert electrode and the nutcauses a creeping of the resin at a time of tightening the bolt. Thecreeping of the resin causes a reduction in axial force while in use orright after tightening the bolt. The reduction in axial force mayseriously degrade an assumed quality of the power module. Thus, theprevention of the intrusion of the resin is a significantly importantfactor in performing the resin sealing.

Known as techniques of temporarily fixing an insert electrode and a nutat a time of resin sealing are a technique of providing a resin plate totighten a bolt and a technique of temporarily fixing the nutmagnetically. However, the above techniques have a problem that anattachment force between the nut and the insert electrode is weak, sothat a gap occurs, and a dissolved resin enters the gap. A technique oftemporarily fixing a nut in a rotational direction is known (refer toPatent Document 1).

PRIOR ART DOCUMENT Patent Document

Patent Document 1: Japanese Patent Application Laid-Open No. 2002-5128

SUMMARY Problem to be Solved by the Invention

However, the conventional technique is focused on the temporal fixing ofthe nut in the rotational direction, so that it has a problem that theattachment force in an axial direction is weak, and a gap easily occursbetween the electrode and the nut.

The present invention has been achieved to solve problems as describedabove, and it is an object of the present invention to provide asemiconductor device having a structure in which a resin hardly entersbetween an insert electrode and a nut at a time of resin sealing.

Means to Solve the Problem

A semiconductor device according to the present invention includes aninsert electrode having an insert hole into which a bolt is insertedfrom outside, a nut which has a screw hole to be screwed with the boltand is disposed on an inside of the insert electrode so that the screwhole is communicated with the insert hole, at least one semiconductorelement being electrically connected to the insert electrode, and aresin sealing the inside of the insert electrode, the nut, and the atleast one semiconductor element, wherein a burr is provided on an outerperiphery of a direct contact surface of the nut being in direct contactwith the insert electrode.

The semiconductor device according to the present invention includes aninsert electrode having an insert hole into which a bolt is insertedfrom outside, a nut which has a screw hole to be screwed with the boltand is disposed on an inside of the insert electrode so that the screwhole is communicated with the insert hole, at least one semiconductorelement being electrically connected to the insert electrode, and aresin sealing the inside of the insert electrode, the nut, and the atleast one semiconductor element, wherein at least one of the nut and theinsert electrode has a press fit structure of being pressed into theother one of the nut and the insert electrode.

The semiconductor device according to the present invention includes aninsert electrode having an insert hole into which a bolt is insertedfrom outside, a nut which has a screw hole to be screwed with the boltand is disposed on an inside of the insert electrode so that the screwhole is communicated with the insert hole, at least one semiconductorelement being electrically connected to the insert electrode, and aresin sealing the inside of the insert electrode, the nut, and the atleast one semiconductor element, wherein the insert electrode has aU-shaped part, and in a first part and a second part facing each otherin the U-shaped part, the insert hole is provided in the first part, thedirect contact surface of the nut is in direct contact with the firstpart, an end part of the nut on an opposite side of the direct contactsurface is in direct contact with the second part, and the nut ispressed between the first part and the second part.

Effects of the Invention

The semiconductor device according to the present invention can achievethe semiconductor device which suppresses the resin entering between thenut and the inside of the insert electrode. Accordingly, the occurrenceof the creeping of the resin at the time of tightening the bolt on theinsert electrode can be suppressed, thus the semiconductor device havingthe high reliability can be obtained.

These and other objects, features, aspects and advantages of the presentinvention will become more apparent from the following detaileddescription of the present invention when taken in conjunction with theaccompanying drawings.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is an exploded side view of an insert electrode and a nut of asemiconductor device according to an embodiment 1.

FIG. 2 is a side view of the insert electrode, a semiconductor element,and the nut of the semiconductor device according to the embodiment 1.

FIG. 3 is a side view of an insert electrode and a nut of asemiconductor device according to an embodiment 2.

FIG. 4 is a side view of an insert electrode and a nut of asemiconductor device according to an embodiment 3.

FIG. 5 is an exploded perspective view of the insert electrode and thenut of the semiconductor device according to the embodiment 3.

FIG. 6 is a perspective view of the insert electrode and the nut of thesemiconductor device according to the embodiment 3.

FIG. 7 is a side view of an insert electrode and a nut of asemiconductor device according to an embodiment 4.

FIG. 8 is an exploded perspective view of the insert electrode and thenut of the semiconductor device according to the embodiment 4 whenviewed from an outside of the insert electrode.

FIG. 9 is an exploded perspective view of the insert electrode and thenut of the semiconductor device according to the embodiment 4 whenviewed from an inside of the insert electrode.

FIG. 10 is an exploded perspective view of an insert electrode and a nutof a semiconductor device according to an embodiment 5 when viewed fromthe outside of the insert electrode.

FIG. 11 is an exploded perspective view of the insert electrode and thenut of the semiconductor device according to the embodiment 5 whenviewed from the inside of the insert electrode.

FIG. 12 is an exploded side view of an insert electrode and a nut of asemiconductor device according to an embodiment 6.

FIG. 13 is a side view of an insert electrode and a nut of asemiconductor device according to an embodiment 7.

FIG. 14 is an exploded perspective view of the insert electrode and thenut of the semiconductor device according to the embodiment 7.

DESCRIPTION OF EMBODIMENT(S) Embodiment 1

<Configuration>

FIG. 1 is an exploded side view of an insert electrode 102 and a nut 103of a semiconductor device according to the present embodiment 1. FIG. 2is a side view of the insert electrode 102 and the nut 103 of thesemiconductor device according to the present embodiment 1.

As illustrated in FIG. 1 and FIG. 2, an insert hole 102 a into which abolt (not shown) is inserted from outside is provided in the insertelectrode 102.

A screw hole is provided in the nut 103. As illustrated in FIG. 2, thenut 103 is disposed on an inside of the insert electrode 102 so that thescrew hole is communicated with the insert hole 102 a.

As illustrated in FIG. 1, the nut 103 is a cap nut (non-penetrating typenut) having a fringe 103 e. A bearing surface of the nut 103 (that is tosay, a contact surface between the fringe 103 e and the insert electrode102) is defined as a direct contact surface 103 a. A burr 103 b isseamlessly provided on an outer periphery of the direct contact surface103 a (that is to say, an edge portion of the fringe 103 e) of the nut103. The burr 103 b is a flange provided on the outer periphery of thedirect contact surface 103 a (that is to say, the bearing surface of thenut 103) of the nut 103. As illustrated in FIG. 1, the burr 103 bprotrudes toward the insert electrode 102 before the resin sealing.

A semiconductor element 105 is electrically connected to the insertelectrode 102 via a wire 106, for example. The semiconductor element 105is solder-joined to an insulating substrate (not shown) in which a metalpattern is formed on both surfaces thereof, for example.

As illustrated in FIG. 2, the inside of the insert electrode 102, thenut 103, and the semiconductor element 105 are sealed with a sealingresin 104 . . . etc. . . . .

As illustrated in FIG. 2, the inside of the insert electrode 102, thenut 103, and the semiconductor element (not shown) are sealed with asealing resin 104. In a state of resin sealing, the burr 103 b of thenut 103 is crushed, and the direct contact surface 103 a of the nut 103and the inside of the insert electrode 102 are closely attached to eachother.

The nut 103 of the present embodiment 1 is a nut including the fringe103 e, however, a nut which does not include the fringe 103 e is alsoapplicable. In this case, the burr 103 b is provided on a main body ofthe nut 103 along the outer periphery of the direct contact surface 103a.

<Manufacturing Method>

As illustrated in FIGS. 1 and 2, firstly, the insert electrode 102,electrically connected to the semiconductor element 105 via wire 106, isdisposed on a mold 101. Then, the nut 103 is disposed on the insertelectrode 102. At this time, the nut 103 is disposed so that the screwhole of the nut 103 is communicated with the insert hole 102 a. Then,the resin 104 is injected inside the mold 101 and is hardened.Accordingly, the inside of the insert electrode 102, the nut 103, andthe semiconductor element 105 are sealed with the sealing resin 104.Then, as illustrated in FIG. 2, the burr 103 b provided on the outerperiphery of the direct contact surface 103 a of the nut 103 is crushed.As a result, the crushed burr 103 b and the inside of the insertelectrode 102 are closely attached to each other.

<Effect>

The semiconductor device according to the embodiment 1 includes theinsert electrode 102 having the insert hole 102 a into which the bolt(not shown) is inserted from the outside, the nut 103 which has thescrew hole to be screwed with the bolt and is disposed on the inside ofthe insert electrode 102 so that the screw hole is communicated with theinsert hole 102 a, at least one semiconductor element 105 beingelectrically connected to the insert electrode 102, and a resin 104sealing the inside of the insert electrode 102, the nut 103, and the atleast one semiconductor element 105, wherein the burr 103 b is providedon the outer periphery of the direct contact surface 103 a of the nut103 being in direct contact with the insert electrode 102.

In the semiconductor device according to the present embodiment 1, theburr 103 b is provided on the outer periphery of the direct contactsurface 103 a of the nut 103 to prevent the resin 104 from enteringbetween the insert electrode 102 and the nut 103 in the resin sealingprocess. Since the burr 103 b is pressed to the inside of the insertelectrode 102 and crushed at the time of resin sealing, the part wherethe burr 103 b is provided in the nut and the insert electrode 102 areclosely attached to each other in an axial direction of the screw hole.That is to say, the occurrence of the gap which the resin 104 entersbetween the nut 103 and the inside of the insert electrode 102 can besuppressed. Thus, the semiconductor device which suppresses the resinentering between the nut 103 and the insert electrode 102 can beobtained. Accordingly, the occurrence of the creeping of the resin atthe time of tightening the bolt on the insert electrode 102 can besuppressed, thus the semiconductor device having the high reliabilitycan be obtained.

Embodiment 2

FIG. 3 is a side view of the insert electrode 102 and the nut 103 of asemiconductor device according to the present embodiment 2. In thepresent embodiment 2, a groove 103 c is provided along the outerperiphery of the nut 103 (that is to say, along the outer periphery ofthe fringe 103 e). The groove 103 c is provided in parallel to thedirect contact surface 103 a. The groove 103 c is preferably providedseamlessly along the outer periphery of the nut 103, but may also beprovided on a part of the outer periphery of the nut 103. Although onegroove 103 c is provided in FIG. 3, a plurality of grooves 103 c mayalso be provided along the outer periphery of the nut 103.

The nut 103 of the embodiment 2 is a nut including the fringe 103 e,however, a nut which does not include the fringe 103 e is alsoapplicable. In this case, the groove 103 c is provided along the outerperiphery of the main body of the nut. Another configuration of thesemiconductor device in the present embodiment 2 is the same as theconfiguration in the embodiment 1, thus the description is omitted.

<Effect>

In the semiconductor device according to the present embodiment 2, thegroove 103 c extending in a direction parallel to the direct contactsurface 103 a is provided along the outer periphery of the nut 103.Since the groove 103 c is provided, increased is an area in the nut 103to which the pressured is applied from the resin 104 in a directionwhich the nut 103 is pressed to the insert electrode 102 (the axialdirection of the screw hole). Thus, the nut 103 can be closely attachedto the insert electrode 102 more firmly at the time of resin sealing.

Embodiment 3

FIG. 4, FIG. 5, and FIG. 6 are a side view, an exploded perspectiveview, and a perspective view of the insert electrode 102 and the nut 103of the semiconductor device according to the present embodiment 3,respectively.

As illustrated in FIG. 4 and FIG. 6, an insert hole 102 a into which thebolt (not shown) is inserted from the outside is provided in the insertelectrode 102. A screw hole 103 c is provided in the nut 103. Asillustrated in FIGS. 4 to 6, the nut 103 is disposed on the inside ofthe insert electrode 102 so that the screw hole is communicated with theinsert hole 102 a.

As illustrated in FIG. 4, the nut 103 is a cap nut having the fringe 103e. In a manner similar to the embodiment 1, the bearing surface of thenut 103 (that is to say, the contact surface between the fringe 103 eand the insert electrode 102) is defined as the direct contact surface103 a.

As illustrated in FIG. 5, a stepped part 103 d is provided on the directcontact surface 103 a (that is to say, the bearing surface of the fringe103 e) of the nut 103. The stepped part 103 d is provided to beconcentric with the screw hole of the nut 103 and to surround the screwhole.

Since the stepped part 103 d as a press fit structure is pressed intothe insert hole 102 a, an inside of the insert hole 102 a (a side in aninner diameter direction) and an outside of the stepped part 103 d (aside in an outer diameter direction) are closely attached to each other.

In the manner similar to the embodiment 1, the semiconductor element notshown is electrically connected to the insert electrode 102 via thewire, for example. The semiconductor element is solder-joined to theinsulating substrate (not shown) in which the metal pattern is formed onthe both surfaces thereof, for example.

As illustrated in FIG. 4, the inside of the insert electrode 102, thenut 103, and the semiconductor element (not shown) are sealed with thesealing resin 104.

The nut 103 of the present embodiment 1 includes the fringe 103 e andhas the stepped part 103 d on the bearing surface of the fringe 103 e,however, a nut which does not include the fringe 103 e is alsoapplicable. In this case, the stepped part 103 d is provided on thebearing surface of the main body of the nut 103.

<Manufacturing Method>

As illustrated in FIG. 6, firstly, the stepped part 103 d of the nut 103is pressed into the insert hole 102 a of the insert electrode 102. Then,the resin 104 is injected inside the mold 101 and is hardened.Accordingly, the inside of the insert electrode 102, the nut 103, andthe semiconductor element (not shown) are sealed with the sealing resin104.

<Effect>

The semiconductor device according to the present embodiment 3 includesthe insert electrode 102 having the insert hole 102 a into which thebolt (not shown) is inserted from the outside, the nut 103 which has thescrew hole to be screwed with the bolt and is disposed on the inside ofthe insert electrode 102 so that the screw hole is communicated with theinsert hole 102 a, at least one semiconductor element being electricallyconnected to the insert electrode 102, and a resin 104 sealing theinside of the insert electrode 102, the nut 103, and the at least onesemiconductor element, wherein at least one of the nut 103 and theinsert electrode 102 has a press fit structure of being pressed into theother one of the nut 103 and the insert electrode 102.

Accordingly, at least one of the nut 103 and the insert electrode 102has the press fit structure of being pressed into the other one of thenut 103 and the insert electrode 102, thus the nut 103 and the insertelectrode 102 can be closely attached to each other with no gap. Theresin sealing is performed in a state where the nut 103 and the insideof the insert electrode 102 are closely attached to each other with nogap, thus the semiconductor device which suppresses the resin 104entering between the nut 103 and the insert electrode 102 can beobtained. Accordingly, the occurrence of the creeping of the resin atthe time of tightening the bolt on the insert electrode 102 can besuppressed, thus the semiconductor device having the high reliabilitycan be obtained.

Moreover, in the semiconductor device according to the presentembodiment 3, the press fit structure is the stepped part 103 dconcentric with the screw hole provided in the direct contact surface103 a of the nut 103, and the stepped part 103 d of the nut 103 ispressed into the insert hole 102 a.

Accordingly, the stepped part 103 d concentric with the screw holeprovided in the direct contact surface 103 a of the nut 103 is provided,and the stepped part 103 d is pressed into the insert hole 102 a, thusthe nut 103 and the insert electrode 102 can be closely attached to eachother with no gap.

Embodiment 4

FIG. 7, FIG. 8, and FIG. 9 are a side view of the insert electrode 102and the nut 103 of a semiconductor device according to the presentembodiment 4, an exploded perspective view of them viewed from outsideof the insert electrode 102, and an exploded perspective view of themviewed from inside of the insert electrode 102, respectively.

In the present embodiment 4, as illustrated in FIG. 8 and FIG. 9, aplurality of protrusions 103 f are provided on the outer periphery ofthe nut 103 (that is to say, the outer periphery of the fringe 103 e).An inner diameter of the insert hole 102 a of the insert electrode 102is a size to be fitted with the bearing surface of the nut 103 (thebearing surface of the fringe 103 e). A plurality of concave parts 102 bare provided on an edge of the insert hole 102 a at intervalscorresponding to the interval between the plurality of protrusions 103 fprovided on the nut 103.

Another configuration of the semiconductor device in the presentembodiment 4 is the same as the configuration in the embodiment 3, thusthe description is omitted.

<Manufacturing Method>

As illustrated in FIG. 8 and FIG. 9, firstly, the fringe 103 e of thenut 103 is fitted with the insert hole 102 a of the insert electrode102. At this time, each protrusion 103 f of the nut 103 is pressed intoeach concave part 102 b of the insert electrode 102. Then, the resin 104is injected inside the mold 101 and is hardened. Accordingly, the insideof the insert electrode 102, the nut 103, and the semiconductor element(not shown) are sealed with the sealing resin 104.

<Effect>

In the semiconductor device according to the present embodiment 4, thepress fit structure includes the plurality of protrusions 103 f providedon the outer periphery of the nut 103 and the plurality of concave parts102 b provided on the edge of the insert hole 102 a, and each of theplurality of protrusions 103 f is pressed into each of the plurality ofconcave parts 102 b.

In the present embodiment 4, provided on an area of contact between thenut 103 and the insert electrode 102 is the press fit structure thateach of the plurality of protrusions 103 f is pressed into each of theplurality of concave parts 102 b. Accordingly, a close attachment of thenut 103 to the electrode 102 is enhanced. The resin sealing can beperformed in the state where the nut 103 and the inside of the insertelectrode 102 are closely attached to each other with no gap, thus thesemiconductor device which suppresses the resin 104 entering between thenut 103 and the insert electrode 102 can be obtained. Furthermore, whenthe nut 103 is intended to be fixed to have a specific directionalproperty, the direction of the nut 103 can be defined by a position ofthe protrusion 103 f and the concave part 102 b. Thus, a positioning ofthe nut 103 can be easily performed, and a productivity of thesemiconductor device can be enhanced.

Embodiment 5

FIG. 10 and FIG. 11 are an exploded perspective view of the insertelectrode 102 and the nut 103 of a semiconductor device according to thepresent embodiment 5 viewed from outside of the insert electrode 102,and an exploded perspective view of them viewed from inside of theinsert electrode 102, respectively.

In the present embodiment 5, as illustrated in FIG. 10, the stepped part102 c is provided in the inside of the insert electrode 102. The steppedpart 102 c is one step lower than an inner surface of the insertelectrode 102. The stepped part 102 c is provided to be concentric withthe insert hole 102 a. The direct contact surface 103 a (that is to say,the fringe 103 e) of the nut 103 is pressed into the stepped part 102 c.That is to say, the side of the stepped part 102 in the inner diameterdirection and the side of the direct contact surface 103 a of the nut103 in the outer diameter direction are closely attached to each other.

A plurality of concave parts 102 d are provided in a bottom surface ofthe stepped part 102 c of the insert electrode 102. A plurality ofprotrusions 103 g are provided on the direct contact surface 103 a ofthe nut 103.

Another configuration of the semiconductor device in the presentembodiment 5 is the same as the configuration in the embodiment 3, thusthe description is omitted.

<Manufacturing Method>

As illustrated in FIG. 10 and FIG. 11, firstly, the fringe 103 e of thenut 103 are pressed into the stepped part 102 c of the insert electrode102. At this time, each protrusion 103 f provided on the direct contactsurface 103 a of the nut 103 is pressed into and fitted with eachconcave part 102 d provided in the stepped part 102 c of the insertelectrode 102. Then, the resin 104 is injected inside the mold 101 andis hardened.

Accordingly, the inside of the insert electrode 102, the nut 103, andthe semiconductor element (not shown) are sealed with the sealing resin104.

<Effect>

In the semiconductor device according to the present embodiment 5, thepress fit structure has a stepped part 102 c which is provided in theinsert electrode 102 and into which the direct contact surface 103 a ofthe nut 103 is pressed, the plurality of protrusions 103 g provided onthe direct contact surface of the nut 103, and the plurality of concaveparts 102 d provided in the bottom surface of the stepped part 102 c ofthe insert electrode 102 to be fitted with the plurality of protrusions103 g, respectively.

In the present embodiment 5, the stepped part 102 c into which thedirect contact surface 103 a of the nut 103 is pressed is provided inthe insert electrode 102 as the press fit structure. This press fitstructure enables the close attachment of the nut 103 to the inside ofthe insert electrode 102 with no gap. Furthermore, when the nut 103 isintended to be fixed to have a specific directional property, adirection of the nut 103 can be defined by a position of the protrusion103 g and the concave part 102 d. Thus, the positioning of the nut 103can be easily performed, and the productivity of the semiconductordevice can be enhanced.

Embodiment 6

FIG. 12 is an exploded side view of the insert electrode 102 and the nut103 of a semiconductor device according to the present embodiment 6.

As illustrated in FIG. 12, an insert hole 102 a into which the bolt (notshown) is inserted from the outside is provided in the insert electrode102. The screw hole is provided in the nut 103. The nut 103 is disposedon the inside of the insert electrode 102 so that the screw hole iscommunicated with the insert hole 102 a.

As illustrated in FIG. 12, the nut 103 is the cap nut having the fringe103 e. In the manner similar to the embodiment 1, the bearing surface ofthe nut 103 (that is to say, the contact surface between the fringe 103e and the insert electrode 102) is defined as the direct contact surface103 a.

As illustrated in FIG. 12, the insert electrode 102 has a U-shaped part.The U-shaped part is made up of a first part 1021, a second part 1022facing the first part, and a part connecting the first part 1021 and thesecond part 1022. The insert hole 102 a are provided in the first part1021 of the insert electrode 102. In the U-shaped part, a distancebetween the first part 1021 and the second part 1022 is smaller than aheight of the nut 103.

The nut 103 is disposed to be held in the U-shaped part of the insertelectrode 102. That is to say, the direct contact surface 103 a of thenut 103 is in direct contact with the first part 1021, and an end partof the nut 103 on an opposite side of the direct contact surface 103 a(that is to say, a head part of the nut 103) is in direct contact withthe second part.

In the U-shaped part, the distance between the first part 1021 and thesecond part 1022 is smaller than the height of the nut 103, thus the nut103 is pressed and fixed between the first part 1021 and the second part1022.

In the manner similar to the embodiment 1, the semiconductor element notshown is electrically connected to the insert electrode 102 via thewire, for example. The semiconductor element is solder-joined to theinsulating substrate (not shown) in which the metal pattern is formed onthe both surfaces thereof, for example. The inside of the insertelectrode 102, the nut 103, and the semiconductor element (not shown)are sealed with the sealing resin 104.

The nut 103 of the present embodiment 1 includes the fringe 103 e,however, a nut which does not include the fringe 103 e is alsoapplicable. In this case, the bearing surface of the main body of thenut 103 serves as the direct contact surface 103 a.

<Manufacturing Method>

As illustrated in FIG. 12, firstly, the insert electrode is disposed onthe mold 101. Then, the nut 103 is pressed into the U-shaped part of theinsert electrode 102 and is disposed so that the screw hole of the nut103 is communicated with the insert hole 102 a. At this time, the nut103 is pressed between the first part 1021 and the second part 1022 ofthe U-shaped part. Then, the resin 104 is injected inside the mold 101and is hardened. Accordingly, the inside of the insert electrode 102,the nut 103, and the semiconductor element (not shown) are sealed withthe sealing resin 104.

<Effect>

The semiconductor device according to the present embodiment 6 includesthe insert electrode 102 having the insert hole 102 a into which thebolt is inserted from the outside, the nut 103 which has the screw holeto be screwed with the bolt and is disposed on the inside of the insertelectrode 102 so that the screw hole is communicated with the inserthole 102 a, at least one semiconductor element being electricallyconnected to the insert electrode 102, and a resin sealing the inside ofthe insert electrode 102, the nut 103, and the at least onesemiconductor element, wherein the insert electrode 102 has the U-shapedpart, and in the first part 1021 and the second part 1022 facing eachother in the U-shaped part, the insert hole 102 a is provided in thefirst part 1021, the surface of the nut 103 having the screw hole (thatis to say, the direct contact surface 103 a) is in direct contact withthe first part 1021, the end part of the nut 103 on an opposite side ofthe direct contact surface 103 a is in direct contact with the secondpart 1022, and the nut 103 is pressed between the first part 1021 andthe second part 1022.

In the present embodiment 6, the nut 103 is pressed and fixed betweenthe first part 1021 and the second part 1022 of the U-shaped part of theinsert electrode 102.

Thus, the nut 103 can be closely attached to the insert electrode 102with no gap. The resin sealing is performed in the state where the nut103 and the inside of the insert electrode 102 are closely attached toeach other with no gap, thus the semiconductor device which suppressesthe resin 104 entering between the nut 103 and the insert electrode 102can be obtained. Accordingly, the occurrence of the creeping of theresin at the time of tightening the bolt on the insert electrode 102 canbe suppressed, thus the semiconductor device having the high reliabilitycan be obtained.

Embodiment 7

FIG. 13 and FIG. 14 are a side view and an exploded side view of theinsert electrode 102 and the nut 103 of the semiconductor deviceaccording to the present embodiment 7, respectively.

In the present embodiment 7, a concave part 102 e is further provided inthe first part 1021 of the U-shaped part of the insert electrode 102.The insert hole 102 a is provided in a bottom part of the concave part102 e. The direct contact surface 103 a of the nut 102 is fitted withthe concave part 102 e of the insert electrode 102.

Another configuration of the semiconductor device in the presentembodiment 7 is the same as the configuration in the embodiment 6, thusthe description is omitted.

<Effect>

In the semiconductor device according to the present embodiment 7, theconcave part 102 e is provided in the first part 1021 of the insertelectrode 102, and the surface of the nut 103 having the screw hole(that is to say, the direct contact surface 103 a) is fitted with theconcave part 102 e of the insert electrode 102.

In the present embodiment 7, the concave part 102 e of the insertelectrode 102 and the surface of the nut 103 having the screw hole (thatis to say, the direct contact surface 103 a) is fitted with each other.Thus, the positioning of the nut 103 can be easily performed at the timeof locating the nut 103 in the insert electrode 102. Accordingly, theproductivity of the semiconductor device can be enhanced in addition tothe effect described in the embodiment 6. Furthermore, the concave part102 e of the insert electrode 102 and the direct contact surface 103 aof the nut 103 are fitted with each other, thus an acceptable amount oftolerance increases with respect to a height direction of the nut 103.

The present invention has been shown and described in detail, theforegoing description is in all aspects illustrative and notrestrictive. It is therefore understood that numerous modifications andvariations can be devised without departing from the scope of theinvention.

EXPLANATION OF REFERENCE SIGNS

101 mold, 102 insert electrode, 102 a insert hole, 102 b concave part,102 c stepped part, 102 d concave part, 102 e stepped part, 1021 firstpart, 1022 second part, 103 nut, 103 a direct contact surface, 103 bburr, 103 c groove, 103 d stepped part, 103 e fringe, 103 f, 103 gprotrusion, 104 sealing resin, 105 semiconductor element, 106 wire.

The invention claimed is:
 1. A semiconductor device, comprising: an insert electrode having an insert hole into which a bolt is inserted from outside; a nut which has a screw hole to be screwed with said bolt and is disposed on an inside of said insert electrode so that said screw hole is communicated with said insert hole; at least one semiconductor element being electrically connected to said insert electrode; and a resin sealing said inside of said insert electrode, said nut, and said at least one semiconductor element, wherein a burr, to be crushed, is provided on an outer periphery of a direct contact surface of said nut being in direct contact with said insert electrode, said burr protrudes in a direction inclined toward an outer side of said outer periphery with respect to a direction toward said insert electrode before being crushed, and said nut is pressed to said inside of said insert electrode by said resin, thereby said burr is crushed such that said burr is deformed in a direction toward a side of said nut opposite to said screw hole.
 2. The semiconductor device according to claim 1, wherein a groove extending in a direction parallel to said direct contact surface is provided along said outer periphery of said nut.
 3. The semiconductor device according to claim 1, wherein said crushed burr radially surrounds an area between the nut and the insert electrode to suppress said resin from entering between said nut and said insert electrode. 